
Axcelis Technologies, Inc.
Axcelis Technologies, Inc. (ACLS) Free Cash Flow & Analysis
Annual & trailing free cash flow, FCF margin, YoY change, valuation ratios, and peer context.
ACLS · free cash flow · updated Jun 8, 2026
Core FCF metrics
ACLS · FCF · TTM · margin & CAGRFree cash flow was $107.0M for FY2025 (fiscal year ending 2025-12-31), down 16.8% year-over-year The FCF margin was 12.8%. Five-year CAGR stands at +11.4%.
Annual free cash flow history
Annual free cash flow data
FCF valuation metrics
ACLS · P/FCF · FCF yield · FCF per shareAxcelis Technologies, Inc. (ACLS) trades at a FCF yield of 1.85% and a price-to-free-cash-flow ratio of 55.3x. FCF per share stands at $2.80, calculated using trailing twelve-month FCF divided by basic weighted-average shares outstanding.
Cash flow statement summary
ACLS · cash flow statement · operating / investing / financingFor FY2025, Axcelis Technologies, Inc. generated $118.3M in operating cash flow and spent 11M in capital expenditures, yielding $107.0M in free cash flow.
For the complete Operating / Investing / Financing line-item breakdown:
View Full Cash Flow Statement →Free cash flow vs peers (Technology)
About Free Cash Flow & Methodology
Axcelis Technologies, Inc. (ACLS) reported free cash flow of $107.0M for FY2025 (fiscal year ending 2025-12-31), down 16.8% year-over-year. The FCF margin was 12.8%.
Based on available data, Axcelis Technologies, Inc. has maintained positive free cash flow for at least 10 fiscal year(s). FCF peaked at $204.9M in FY2022. The 5-year CAGR stands at +11.4%.
Axcelis Technologies, Inc.'s FCF yield is 1.85% and price-to-FCF ratio is 55.3x for FY2025, based on the latest available data.
Data sourced from FMP /cash-flow-statement · SEC 10-K / 10-Q · USD.
Frequently asked questions
ACLS free cash flow · 8 questionsAxcelis Technologies, Inc. free cash flow was $107.0M for FY2025, down 16.8% year-over-year. On a trailing twelve-month (TTM) basis, free cash flow stands at $88.5M.
▸ Source: FMP /cash-flow-statement · US GAAP · Axcelis Technologies, Inc. · Axcelis Technologies, Inc. SEC 10-K & 10-Q filings · US GAAP · Last updated: Jun 8, 2026